Services and Engineering: IV

Antisticking-coating service:

Antisticking layers (ASL) are available for replication tools as well as for lithography-masks.

ASL are a very useful added functionality to our products when easy mold-separation is essential for your replication process.

We do also offer anti-sticking coatings for lithography-masks. An additional ASL can become the best measure to reduced sticking forces between mask and resist-coating. This is very helpful way to avoid mask-contamination due to resist-voids, thus increasing "operating-hours-between-cleaning". This is particularly crucial with thick resists (e.g SU-8) and -inherently- long exposure durations.

Our ASL coatings still allow the use of organic solvents (Aceton, IPA, etc.) for intermediate mask-cleaning.
Antisticking-coatings are Si-F based and can be refreshed and thereby substantially extending mask-life.

1: Antisticking layer (ASL) on 5inch Mask to avoid defects during hard-contact exposure.

2: Antisticking layer (ASL) on 5inch Mask to avoid defects during hard-contact exposure.

3: Antisticking layer (ASL) on Nickel-mold for PDMS casting.

4: Antisticking layer (ASL) on Nickel-mold for PDMS casting.

5: Antisticking layer (ASL) on Nickel hot-embossing stamp.

6: Wetting-angle measuring procedure.

7: Wetting-angle measuring procedure.

8: Measuring protocol: wetting-angle = 113.2°