High definition microstructured Watch components.
Characteristics:
Our high-definition watch components are made using the very versatile UV-LiGA process with photoresist features defining an inverted shape of the final part-geometry. More than any other category, microparts need to have vertical sidewalls in order to function mechanically.
1: Collection of singulated watch components
2: Wafer-batch with electroformed Nickel-components
3: Wafer-batch immediately after Ni-electroforming
4: Layout-optimized wafer-batch with watch-components
5: Close-up on typical watch-components, before lapping
6: Wafer-batch immediately after Ni-electroforming
7: Fully-populated wafer with 500µm deep cavities, ready for electroforming
8: Microscope-inspection on pattern-definition of micro-connectors
9: SEM-image of pattern-definition and profile on a USAF-target.
10: Microscope-inspection on pattern-definition of micro-connectors
11: Microscope-inspection on pattern-definition of micro-gearwheels
12: Microscope-inspection on pattern-definition of micro-gearwheels
13: Wafer-batch with electroformed Nickel-components
14: Wafer-batch with electroformed Nickel-components
Material: Nickel-Phos12 (580HV), non-magnetic, stainless
Applications: High-definition UV-LiGA watch-components
Specifications:
- Pattern size ≥ 5µm
- Part thickness = 20 - 500µm
- Material: Nickel-Phos12 (580HV), non-magnetic, stainless
- Aspect ratio = 5 - 6 (depends on pattern-design)
- EXCLUSIVE: Adjustable pattern-tapering up to ‹ 15°
- Manufacturing according to adapted LiGA-process
- Multilevel pattern available (e.g. for gearwheel-systems)
- Alignment-precision: level-to-level ≤ 3μm
- Maximal patterned area = 200 x 200mm
- Parallelism Frontside-to-backside ≤ 10μm
- Available PVD-coatings (e.g. noble metals, wear-resistant coat.)
- Compatible photoresist for UV-lithography:
AZ positive resists, Microchem SU-8
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1. Convert customer data into Maskdesign
2. Fabrication of maskset
3. Lithography on substrates =» resist-mold
4. Prepare the resist-master for Ni-electroforming
5. Lapping excessive Nickel to final thickness and surface finishing (polishing)
6. Removal of resist
7. Optional coating with noble metal or wear-resistant coating