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Services and Engineering: I

Resist coating service:

applied microSWISS is offering a resist coating service to its customer.

Lithographic processes begin with a perfectly coated photoresist. Coating uniformity and proper softbake are essential. We have extensive knowledge in photoresist-processing and it starts with substrate preparation (e.g. cleaning, dehydration and adhesion promotor).

We have identified our photoresist-processes as a very precious asset and constantly keep improving it.

We also take great precaution on particle contamination and are well equipped and trained to deliver high-quality coated wafers, glass-plates and other customer substrates.

Specifications:

List standard available photoresists:
Various positive-tone Merck AZ resists for the full range of thicknesses.
Megaposit SPR 220 series
Kayaku (former: MicroChem) Photoexpoxy SU-8, KMPR
Image reversal Lift-off (AZ nLOF 20xx, TI35 ES, TI35 ESX)

Substrate formats:
Round substrates: ø100, ø150, ø200, ø300mm
Square substrates: 4", 5", 6", 7", 9"

Available Resist thickness:
Positive-tone resists: 100nm - 80µm (e.g. AZ resists)
Negative-tone resists: 3µm - 550µm (e.g. SU-8)

Process flexibility:
Other resists, substrate formats or resist thicknesses on request.

Case study 1: Customer orders AZ 10XT for greyscale lithography on glass-plates
Manufacturing a batch of substrates with 15µm AZ 10XT:

1. Customer sends substrates in cleanroom-compatible container
2. Substrate inspection and preparation (cleaning + adhesion promotor)
3. Resist coating and softbake with superior uniformity
4. Packaging coated wafers in opaque container
5. Shipping with appropriate remarks for handling, care and storage
Case study 2: Customer orders 270µm thick SU-8 on ø200mm Si-wafers
Manufacturing a batch of substrates with 270µm SU-8

1. applied microSWISS to prepare substrates
2. Substrate inspection and preparation (cleaning + adhesion promotor)
3. Resist coating and softbake with superior uniformity
4. Packaging coated wafers in opaque wafer-box
5. Shipping with appropriate remarks for handling, care and storage
Case study 3: Customer orders 200nm thick AZ1805 on 7"x7" Quarz plates
Manufacturing a batch of QZ plates with 200nm AZ 1805

1. Customer sends substrates in cleanroom-compatible container
2. Substrate inspection and preparation (cleaning + adhesion promotor)
3. Resist coating and softbake with superior uniformity
4. Packaging coated wafers in opaque container
5. Shipping with appropriate remarks for handling, care and storage

Website Updated: 07-04-2020 // Copyright © 2020 applied microSWISS GmbH